EMA-ID | AES |
Manufacturer | Physical Electronics |
Model | PHI 690 |
Category | Auger-FEG-SEM |
Location | B.UG1.2.14 |
Lab phone | 8236 |
More Info:
Auger-scanning electron microscope; Analytical resolution: 21nm@10A 10kV, 12nm@10nA 20kV; Scanning Auger; Zalar rotation