Supra 55

EMA-ID Supra55
Manufacturer Zeiss
Model Supra55
Category FEG-SEM
Location B.UG1.2.14
Lab phone 8236
Contact S. Irsen / C. Bitdinger

More Info:

  • Scanning electron microscope
  • 1 - 20 kV electron beam (Schottky field emission gun)
  • 1nm at 20kV; 1.7nm at 1kV

Cameras & Detectors:

  • SE2 Detector 
  • InLens Detector
  • EDX Detector (Oxford)
  • BSE Detector

Software:

  • SmartSEM 
  • INCA (EDXimaging suite)

Applications: 

  • Material and biological samples
  • Elemental mapping

Extras:

  • Airlock system
  • Sample holder for 4 and 6'' wafer
  • TEM holder for grid screening
  • Plasma cleaner 

For further information please contact:

Dr. Stephan Irsen
Group Leader

Supra 55