Auger-scanning electron microscope

EMA-ID AES
Manufacturer Physical Electronics
Model PHI 690
Category Auger-FEG-SEM
Location B.UG1.2.14
Lab phone 8236

More Info:
Auger-scanning electron microscope; Analytical resolution: 21nm@10A 10kV, 12nm@10nA 20kV; Scanning Auger; Zalar rotation

For further information please contact:

Michael Bräuer
Employee / Infrastructure