Focused Ion Beam Microscope

More Info:

• Focused-Ion beam workstation
• 1 - 20 kV electron beam (Schottky field emission gun)
• 5 & 30 kV Ga-Ion beam 

Cameras & Detectors:

• SE2 Detector 
• InLens Detector
• EDX Detector (Oxford)
• EBSD camera (Oxford)
• BSE Detector

Software:

• SmartSEM 
• INCA (EDX&EBSD imaging suite)
• ELPHY nano/lithography

Applications: 

• Automated FIB-tomography
• Cross sectioning of sammples
• FIB-lamella preparation
• FIB-nanolithography
• e-beam lithography
• elemental mapping
• grain analysis 

Extras:

• ELPHY plus lithography system for Ion- & e-beam lithography
• cryo stage and cryo-transfer system (Leica, VCT100) for cryo application
• in-situ micromanipulator (Kleindiek) for room temperature and cryo application
• plasma cleaner for cleaning the sample chamber